Infrared and visible micro-emitters made by lift-off processing in pulsed laser deposited layers - Archive ouverte HAL Access content directly
Conference Papers Year : 2022

Infrared and visible micro-emitters made by lift-off processing in pulsed laser deposited layers

Abstract

Micro-structuration of rare earth doped materials by liftoff processing in pulsed laser deposited layers are promising in photonics since they do not require etching. In this work, we present our recent progress in the fabrication and characterization of such structures for visible and infrared emission. Different kinds of devices have been investigated (micro-disks, micro-strips, grating and so one), with different host materials (Y 2 O 3 and Al 2 O 3 ) and dopant (Eu 3+ and Er 3+ ions). We show here that the shape and the material of the microstructures can be chosen to control the light for different wavelength ranges. This work opens the way of the easy realization of efficient micro-emitter for photonics applications.
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Dates and versions

hal-04139105 , version 1 (23-06-2023)

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Alban Gassenq, Etienne Cleyet-Merle, Yannick Guyot, Hai Son Nguyen, Sébastien Cueff, et al.. Infrared and visible micro-emitters made by lift-off processing in pulsed laser deposited layers. Integrated Photonics Research, Silicon and Nanophotonics, 2022, Maastricht, Netherlands. pp.IW2B.4, ⟨10.1364/IPRSN.2022.IW2B.4⟩. ⟨hal-04139105⟩
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