Trilayered Block Copolymer Nanostructures Formed by an Iterative Layering Strategy
Résumé
Nanostructured block copolymer (BCP) thin films enable the formation on-demand of a variety of periodic patterns at the nanometer scale by tuning the macromolecular BCP characteristics and annealing processes. Significant progress in the control of the self-assembly has been witnessed over the past decade with the implementation of robust directed self-assembly methods. However, the self-assembled structural patterns obtained at equilibrium are limited and methods to expand the range of structural configurations are required to harness additional functionalities. Here, we demonstrate how PS-b-PMMA BCP thin layers can be stacked to produce a library of complex three-dimensional hierarchical heterostructures. In this iterative assembly process based on simple building bricks (i.e.; immobilized BCP patterns forming Holes, Lines and Dots), the stacking configuration (i.e. self-assembly and registration) of a BCP thin film is directed with respect to the previous layer using confinement effects and interfacial energy tuning. This responsive layering can lead to intricate three-dimensional Al2O3 structures and opens the way to a broad variety of structural designs toward functional applications.
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