Poster De Conférence Année : 2023

Micro-nanostructuring of ZrO2 sol-gel by optical and nanoimprint lithography on various substrate for optical applications

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hal-04094460 , version 1 (11-05-2023)

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Victor Vallejo Otero, Nicolas Crespo-Monteiro, Emilie Gamet, Stephanie Reynaud, Nadège Ollier, et al.. Micro-nanostructuring of ZrO2 sol-gel by optical and nanoimprint lithography on various substrate for optical applications. Novel Patterning Technologies 2023, Feb 2023, San Jose, United States. SPIE, ⟨10.1117/12.2657886⟩. ⟨hal-04094460⟩
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