Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography - HAL Accéder directement au contenu
Article dans une revue Nanomaterials Année : 2021

Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Résumé

Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication constraints, such as minimum feature size, that restrict the available design space or compromise compatibility with high-volume fabrication technologies. Indeed, most successful SWG realizations so far relied on electron-beam lithographic techniques, compromising the scalability of the approach. Here, we report the experimental demonstration of an SWG metamaterial engineered beam splitter fabricated with deep-ultraviolet immersion lithography in a 300-mm silicon-on-insulator technology. The metamaterial beam splitter exhibits high performance over a measured bandwidth exceeding 186 nm centered at 1550 nm. These results open a new route for the development of scalable silicon photonic circuits exploiting flexible metamaterial engineering.
Fichier principal
Vignette du fichier
nanomaterials-11-02949-v2.pdf ( 791.98 Ko ) Télécharger
Origine : Fichiers éditeurs autorisés sur une archive ouverte
Licence : Paternité - Pas d'utilisation commerciale - Pas de modification - CC BY 4.0
Loading...

Dates et versions

hal-04077478, version 1 (21-04-2023)

Licence

Paternité - Pas d'utilisation commerciale - Pas de modification - CC BY 4.0

Identifiants

Citer

Vladyslav Vakarin, Daniele Melati, Thi Thuy Duong Dinh, Xavier Le Roux, Warren Kut King Kan, et al.. Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography. Nanomaterials, 2021, 11 (11), pp.2949. ⟨10.3390/nano11112949⟩. ⟨hal-04077478⟩
11 Consultations
45 Téléchargements
Dernière date de mise à jour le 26/06/2024
comment ces indicateurs sont-ils produits

Altmetric

Partager

Gmail Facebook Twitter LinkedIn Plus