Fluid modeling of first products species by electronic Impact with methane in Capacitively coupled plasma
Résumé
Fluid modelisation of capacitively coupled radio-frequency (RF) discharges were carried out for low pressure CH4 plasmas. The present computational includes the motions and collisions of both neutral and charged particles, and we consider 23 species in this study (i.e.20 in total; neutrals, radicals, ions, and electrons) and more than 42 reactions (electronic impact with CH4, neutral-neutral, neutral-ions and surface reactions). This model considers the motions of primaries product of electronic impact with CH4.