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Communication Dans Un Congrès Année : 2016

Experimental study on nanoparticle formation dynamics in HMDSO-Ar asymmetric capacitively-coupled radiofrequency plasma with application to deposition of nanocomposite layers

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hal-03998442 , version 1 (21-02-2023)

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  • HAL Id : hal-03998442 , version 1

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V. Garofano, L. Stafford, J. Gorka, Freddy Gaboriau, Bernard Despax, et al.. Experimental study on nanoparticle formation dynamics in HMDSO-Ar asymmetric capacitively-coupled radiofrequency plasma with application to deposition of nanocomposite layers. 11th IEEE Nanotechnology Materials and Devices Conference (NMDC), Oct. 9-12, 2016, Toulouse (FRANCE), 2016, Toulouse, France. ⟨hal-03998442⟩
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