Correlation between plasma phase and thin films deposition in ICP exited PECVD with Zirconium Tetra tert-Butoxide as precursor - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2014
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hal-03989126 , version 1 (14-02-2023)

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  • HAL Id : hal-03989126 , version 1

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Rick Verhoef, Patrice Raynaud, S. Ligot, R. Snyders, T. Nelis, et al.. Correlation between plasma phase and thin films deposition in ICP exited PECVD with Zirconium Tetra tert-Butoxide as precursor. PSE 2014, 13 -19 september 2014.Garmisch Partenkirchen (GERMANY), 2014, Garmisch Partenkirchen, Germany. ⟨hal-03989126⟩
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