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Communication Dans Un Congrès Année : 2015

Cyclic evolution of the electron temperature and density in dusty low-pressure RF plasmas with pulsed injection of hexamethyldisiloxane

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Plasmas
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hal-03977282 , version 1 (07-02-2023)

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  • HAL Id : hal-03977282 , version 1

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V. Roy Garofano, L. Stafford, Bernard Despax, Richard Clergereaux, Kremena Makasheva. Cyclic evolution of the electron temperature and density in dusty low-pressure RF plasmas with pulsed injection of hexamethyldisiloxane. 22nd International Symposium on Plasma Chemistry (ISPC 22), July 5-10, 2015, Antwerp (BELGIUM), 2015, Antwerp, Belgium. ⟨hal-03977282⟩
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