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Communication Dans Un Congrès Année : 2013

Experimental and numerical characterization of an argon RF inductively coupled plasma for surface treatment.

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hal-03943161 , version 1 (17-01-2023)

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  • HAL Id : hal-03943161 , version 1

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Ch Laurent, B. Cailler, J. Lo, L. Thérèse, D. Mihailova, et al.. Experimental and numerical characterization of an argon RF inductively coupled plasma for surface treatment.. ICOPS : IEEE 40th International Conference on Plasma Sciences San Francisco, CA, USA, 2013, San Francisco, United States. ⟨hal-03943161⟩
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