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Communication Dans Un Congrès Année : 2011

Dielectric layers for RF-MEMS switches: design and study of appropriate structures preventing electrostatic charging

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hal-03942786 , version 1 (17-01-2023)

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Kremena Makasheva, Bernard Despax, Laurent Boudou, Gilbert Teyssedre. Dielectric layers for RF-MEMS switches: design and study of appropriate structures preventing electrostatic charging. ISE 2011: 14th International Symposium on Electrets, Montpellier, France, 2011, Montpellier, France. ⟨hal-03942786⟩
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