Nanostructuring of SnO2 Thin Films by Associating Glancing Angle Deposition and Sputtering Pressure for Gas Sensing Applications
Résumé
SnO2 thin films were prepared by conventional and Glancing Angle Deposition reactive sputtering, and their gas sensing properties were investigated. The porosity of the as-prepared films was widely assessed using optical methods, and the sensing performances of these active layers were correlated with the evolution of surface and film porosity as a function of deposition conditions and annealing treatment. The sensor made of inclined columns grown at high sputtering pressure (6 10
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