Role of Temperature, Pressure, and Surface Oxygen Migration in the Initial Atomic Layer Deposition of HfO 2 on Anatase TiO 2 (101) - Archive ouverte HAL Access content directly
Journal Articles Journal of Physical Chemistry C Year : 2022

Role of Temperature, Pressure, and Surface Oxygen Migration in the Initial Atomic Layer Deposition of HfO 2 on Anatase TiO 2 (101)

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hal-03884304 , version 1 (05-12-2022)

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Giulio D’acunto, Rosemary Jones, Lucía Pérez Ramírez, Payam Shayesteh, Esko Kokkonen, et al.. Role of Temperature, Pressure, and Surface Oxygen Migration in the Initial Atomic Layer Deposition of HfO 2 on Anatase TiO 2 (101). Journal of Physical Chemistry C, 2022, 126 (29), pp.12210-12221. ⟨10.1021/acs.jpcc.2c02683⟩. ⟨hal-03884304⟩
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