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Article Dans Une Revue Applied Surface Science Année : 2022

Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications

Résumé

We report the integration of high-quality epitaxial La 2/3 Sr 1/3 MnO 3 (LSMO) thin films onto SrTiO 3 buffered Silicon-on-Sapphire (SOS) substrates by combining state-of-the-art thin film growth techniques such as molecular beam epitaxy and pulsed laser deposition. Detailed structural, magnetic and electrical characterizations of the LSMO/STO/SOS heterostructures show that the LSMO film properties are competitive with those directly grown on oxide substrates. X-ray magnetic circular dichroism measurements on Mn L 2,3 edges show strong dichroic signal at room temperature, and angular-dependent in-plane magnetic properties by magneto-optical Kerr magnetometry reveal isotropic magnetic anisotropy. Suspended micro-bridges were thus finally fabricated by silicon micromachining, thus demonstrating the potential use of integrating LSMO magnetic layer on industrially compatible SOS substrates for the development of applicative MEMS devices.
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Dates et versions

hal-03843340 , version 1 (08-11-2022)

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Sandeep Kumar Chaluvadi, Zhe Wang, Laryssa M Carvalho de Araújo, Pasquale Orgiani, Vincent Polewczyk, et al.. Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications. Applied Surface Science, 2022, 579, pp.152095. ⟨10.1016/j.apsusc.2021.152095⟩. ⟨hal-03843340⟩
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