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Communication Dans Un Congrès Année : 2022

New Generation of On-Wafer Microwave Probe Station for Precision GSG Probing

Résumé

Accurate characterization of emergent RF extreme impedance micro-and nanoelectronic devices requires novel probing techniques to ensure the probe-to-pad contact repeatability. In this effort, a new generation of nanorobotics on-wafer probing station is developed. Residual calibration error terms related to probe-to-device approach / retract are quantified in the frequency range 50 MHz – 50 GHz. These residual error terms are propagated to determine the overall measurement uncertainty on the determination of extreme complex impedances. In particular, preliminary results considering capacitance value of 1 fF at 10 GHz demonstrate error around 17% versus 80% using a conventional probe station.
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Dates et versions

hal-03835130 , version 1 (31-10-2022)

Identifiants

  • HAL Id : hal-03835130 , version 1

Citer

Cerine Mokhtari, Mohamed Sebbache, Clément Lenoir, Christophe Boyaval, Vanessa Avramovic, et al.. New Generation of On-Wafer Microwave Probe Station for Precision GSG Probing. 24th International Microwave and Radar Conference, MIKON 2022, Sep 2022, Gdansk, Poland. ⟨hal-03835130⟩
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