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            <funder>The project is supported by the Nano 2022 Plan in the frame of the common lab IEMN / STMicroelectronics and by the European Metrology Programme for Innovation and Research (EMPIR) Project 18SIB09 Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies. The EMPIR Programme is co-financed by the Participating States and from the European Union’s Horizon 2020 Research and Innovation Programme.</funder>
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                <term xml:lang="en">vector network analyzer (VNA)</term>
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              <p>Accurate characterization of emergent RF extreme impedance micro-and nanoelectronic devices requires novel probing techniques to ensure the probe-to-pad contact repeatability. In this effort, a new generation of nanorobotics on-wafer probing station is developed. Residual calibration error terms related to probe-to-device approach / retract are quantified in the frequency range 50 MHz – 50 GHz. These residual error terms are propagated to determine the overall measurement uncertainty on the determination of extreme complex impedances. In particular, preliminary results considering capacitance value of 1 fF at 10 GHz demonstrate error around 17% versus 80% using a conventional probe station.</p>
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