Evidence of new point defects optical features in Zr-implanted polycrystalline AlN films - Archive ouverte HAL
Communication Dans Un Congrès Année : 2021
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hal-03829574 , version 1 (25-10-2022)

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  • HAL Id : hal-03829574 , version 1

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A Aghdaei,, R Pandiyan,, B Ilahi,, M Chicoine,, M El Gowini,, et al.. Evidence of new point defects optical features in Zr-implanted polycrystalline AlN films. APS March Meeting 2021, Mar 2021, Virtuel, United States. ⟨hal-03829574⟩
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