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Article Dans Une Revue Vacuum Année : 2014

Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD

Ludovic Avril
  • Fonction : Auteur
Julien Boudon
Maria del Carmen Marco de Lucas
Luc Imhoff

Résumé

The use of a liquid injection delivery system to form composite films containing nanoparticles was investigated. Al₂O₃-TiO₂ films were grown on silicon substrates by direct liquid injection MOCVD (DLI-MOCVD) at 400 °C. The α-Al₂O₃ nanoparticles (α-Al₂O₃NPs) dispersed in TiO₂ films resulted from co-deposition using colloidal α-Al₂O₃ solution and titanium tetra-isopropoxide as titanium precursor. Scanning electron microscopy coupled with EDS as well as Raman spectroscopy confirmed the presence of α-Al₂O₃NPs aggregates embedded in the TiO₂ matrix. The liquid injection system coupled with CVD technique can be promising to form composite films containing preformed nanoparticles.
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Dates et versions

hal-03793018 , version 1 (30-09-2022)

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Ludovic Avril, Julien Boudon, Maria del Carmen Marco de Lucas, Luc Imhoff. Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD. Vacuum, 2014, 107, pp.259-263. ⟨10.1016/j.vacuum.2014.02.020⟩. ⟨hal-03793018⟩

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