Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD
Résumé
The use of a liquid injection delivery system to form composite films containing nanoparticles was investigated. Al₂O₃-TiO₂ films were grown on silicon substrates by direct liquid injection MOCVD (DLI-MOCVD) at 400 °C. The α-Al₂O₃ nanoparticles (α-Al₂O₃NPs) dispersed in TiO₂ films resulted from co-deposition using colloidal α-Al₂O₃ solution and titanium tetra-isopropoxide as titanium precursor. Scanning electron microscopy coupled with EDS as well as Raman spectroscopy confirmed the presence of α-Al₂O₃NPs aggregates embedded in the TiO₂ matrix. The liquid injection system coupled with CVD technique can be promising to form composite films containing preformed nanoparticles.