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Communication Dans Un Congrès Année : 2021

Time reversal plasmas as a versatile space-time patterning deposition method

Résumé

The aim of this communication is to discuss the possibility of using the innovative plasma source that we have developed recently, namely the “Space-Time Plasma Steering Source”, as a versatile space-time deposition method. More precisely, we focus on the space-time control capabilities of time reversal plasmas over large and complex 3D surfaces. Simultaneous ignition of several plasmas by time reversal is also experimentally demonstrated. These unprecedented control capabilities of plasmas could lead to the development of an original and versatile method allowing the patterning of complex 2D or 3D structures on large areas.
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Dates et versions

hal-03765762 , version 1 (31-08-2022)

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Valentin Mazières, Romain Pascaud, Laurent Liard, Simon Dap, Richard Clergereaux, et al.. Time reversal plasmas as a versatile space-time patterning deposition method. 2021 IEEE 16th Nanotechnology Materials and Devices Conference (NMDC), Dec 2021, Vancouver, Canada. pp.1-4, ⟨10.1109/NMDC50713.2021.9677515⟩. ⟨hal-03765762⟩
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