Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 K
Résumé
Two structures, TiN/HZO/TiN and TiN/HZO/AlOx(2nm)/TiN, were fabricated and their electrical properties were studied down to 4.2 K. Low voltage IVs were carried out as well as polarisation-voltage curves at each temperature steps. The aim was to study and compare the evolution of ferroelectric switching and conduction in HZO for both structures. A systematic study of possible charge transport mechanisms was carried out.