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Communication Dans Un Congrès Année : 2021

A multiscale investigation of nanocomposite dielectric permittivity: application to plasma deposited AgNPs-based nanocomposites

Résumé

Thin nanocomposite dielectric films, with tuneable electrical properties, appear convenient for the development of reliable and performant micro-and nano-devices. In this context, nanocomposites based on silver nanoparticles (AgNPs) are attractive due to their multifunctional properties which address applications from biocide treatment [1] to energy [2]. For optimization purposes, their electrical properties and behaviour under electrical stress need to be probed from macroscale to nanoscale. Concerning nanoscale, electrical modes derived from Atomic Force Microscopy appear as the best way. Indeed, Conductive AFM (C-AFM), Kelvin Probe Force Microscopy (KPFM) or Electrostatic Force Microscopy (EFM) have previously been exploited to determine leakage current in gate oxide, charge at oxide/semiconductor interface in MOS devices or dielectric permittivity in composite thick layers [2-4]. In this work, we focus on the dielectric permittivity properties of thin dielectric silica layers with embedded AgNPs. Their structure comprises a single AgNPs layer inserted at well-controlled distance from the SiO2 surface [2, 5]. The dielectric permittivity is probed at macroscale using impedance spectroscopy and at nanoscale using EFM [4-5]. To compare the results and understand the influence of metal inclusions on the dielectric permittivity of silica, a Finite Element Modelling is used. The nanocomposite apparent dielectric permittivity increases when the AgNPs plane is close to surface (less than 20nm). However, the permittivity varies locally depending on the position of the AFM tip: facing a AgNP or placed between two AgNPs. This is related to screening effect induced by the AgNPs. This effect can be anticipated based on electrostatic modelling.
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Dates et versions

hal-03579002 , version 1 (02-03-2022)

Identifiants

  • HAL Id : hal-03579002 , version 1

Citer

C Villeneuve-Faure, Kremena Makasheva, C Rigoudy, Laurent Boudou, G Teyssedre. A multiscale investigation of nanocomposite dielectric permittivity: application to plasma deposited AgNPs-based nanocomposites. C'NANO, Nov 2021, Toulouse, France. ⟨hal-03579002⟩
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