Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes - Archive ouverte HAL
Article Dans Une Revue Microsystems & Nanoengineering Année : 2022

Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes

H. Tunç Çiftçi
  • Fonction : Auteur
Michael Verhage
  • Fonction : Auteur
Tamar Cromwijk
  • Fonction : Auteur
Bert Koopmans
  • Fonction : Auteur
Kees Flipse
  • Fonction : Auteur

Résumé

We present a new approach to tuning fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 mm x 2 mm drastically perturb the oscillation of the tuning fork, resulting in poor performance in its intrinsic force sensing. Therefore, restoring initial oscillatory characteristics is necessary for regaining high sensitivity. To this end, we developed a new approach consisting of three basic steps: tuning fork rebalancing, revamping holder-sensor fixation, and electrode reconfiguration. Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10E4 in air and up to 4 x 10E4 in ultra-high vacuum conditions. The floating-like holder-fixation using soft wires significantly reduces energy dissipation from the mounting elements. Combined with the soft wires, reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal. Finally, our easy-to-implement approach allows converting the atomic force microscopy-tip from a passive tool to a dedicated microdevice with extended functionality.

Dates et versions

hal-03578939 , version 1 (17-02-2022)

Identifiants

Citer

H. Tunç Çiftçi, Michael Verhage, Tamar Cromwijk, Laurent Pham Van, Bert Koopmans, et al.. Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes. Microsystems & Nanoengineering, 2022, 8, pp.51. ⟨10.1038/s41378-022-00379-x⟩. ⟨hal-03578939⟩
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