SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components - Archive ouverte HAL Access content directly
Journal Articles Optics Express Year : 2022

SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components

Abstract

This work presents a “half-etch” horizontal slot waveguide design based on SiN, where only the upper SiN layer is etched to form a strip that confines the mode laterally. The numerical modeling, fabrication, and characterization of passive waveguiding components are described. This novel slot waveguide structure was designed with on-chip light amplification in mind, for example with an Er-doped oxide spacer layer. Proof-of-concept racetrack resonators were fabricated and characterized, showing quality factors up to 50,000 at critical coupling and residual losses of 4 dB/cm at wavelengths away from the N-H bond absorption peak in SiN, demonstrating the high potential of these horizontal slot waveguides for use in active integrated photonics.
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Dates and versions

hal-03574485 , version 1 (25-03-2022)

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Eva Kempf, Pedro Rojo Romeo, Alban Gassenq, Arnaud Taute, Paul Chantraine, et al.. SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components. Optics Express, 2022, 30 (3), pp.4202-4214. ⟨10.1364/OE.446758⟩. ⟨hal-03574485⟩
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