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Article Dans Une Revue Optics Express Année : 2018

Correlation between electrical direct current resistivity and plasmonic properties of CMOS compatible titanium nitride thin films

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hal-03550913 , version 1 (01-02-2022)

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S. Viarbitskaya, J. Arocas, O. Heintz, G. Colas-Des-Francs, D. Rusakov, et al.. Correlation between electrical direct current resistivity and plasmonic properties of CMOS compatible titanium nitride thin films. Optics Express, 2018, 26 (8), pp.9813. ⟨10.1364/OE.26.009813⟩. ⟨hal-03550913⟩
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