High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer - Archive ouverte HAL Access content directly
Poster Communications Year : 2018

High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer

Jia Zhou
Hao Yu
  • Function : Author
  • PersonId : 771227
  • IdRef : 204031214

Abstract

This paper reports the performance of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer (PMUT) under high voltage excitation and determines its limit of power transmission capability. The proposed PMUT array consists of 44×39 elements fabricated on a silicon-on-insulator (SOI) substrate with 1 µm AlN thin film on 5 µm silicon membrane. With all the array elements electrically connected together, the electrical impedance of the PMUT was 11.6-j30 Ohm at 15.8 MHz resonant frequency in air and 4.72-j25 Ohm at 13.9 MHz when the device was water charged. The LDV (Laser Doppler Vibrometer) measurements showed that the transmission efficiency and the bandwidth for free vibration were 1.7 nm/V and 2.1%, respectively. The resonance modes were specifically associated with the substrate and the cavity structure but they are 10~15 dB less in amplitude than the fundamental resonance of the array. Nonlinear behavior was observed when increasing the burst amplitude and the PMUT array broke down when the input mean power applied on the single element exceeded 5.2 mW. This strategy is potentially applied to CMOS-compatible high-resolution ultrasonography.
No file

Dates and versions

hal-03525239 , version 1 (13-01-2022)

Identifiers

Cite

Wen-Juan Liu, Wei-Jiang Xu, Jia Zhou, Nikolay Smagin, Malika Toubal, et al.. High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer. 2018 IEEE International Ultrasonics Symposium (IUS), Oct 2018, Kobe, Japan. IEEE, ISBN 978-1-5386-3426-4 ; e-ISBN 978-1-5386-3425-7, paper P1-A12-4, 1037-1040, Proceedings of IEEE International Ultrasonics Symposium, IUS 2018. ⟨10.1109/ULTSYM.2018.8579892⟩. ⟨hal-03525239⟩
38 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More