Mechanical behavior of surface-patterned and coated Si or Ge wafers for superhydrophobic and antireflective light transmitting windows - Archive ouverte HAL
Article Dans Une Revue Journal of Materials Science Année : 2022

Mechanical behavior of surface-patterned and coated Si or Ge wafers for superhydrophobic and antireflective light transmitting windows

Résumé

The compressive resistance of truncated nanocone lattices produced by lithography and etching steps on Si or Ge wafers to get superhydrophobic and antireflective light transmitting windows, as well as the protection efficiency of alumina or diamond coatings are investigated by numerical simulations of elastic buckling, and nano-compression tests. The latter reveal the limits of an elastic analysis, since the stress at the top of the cones is high enough to trigger plastic flow, or phase changes. Ge nano-cones exhibit a large ductility in compression, and even seem to creep at room temperature. Thin alumina or diamond coatings are however shown to provide an effective protection against both buckling and plastic flow. Surface patterning is shown to induce stress concentrations at the foot of the cones, which reduces the fracture resistance of the substrate in biaxial bending.
Fichier principal
Vignette du fichier
Accepted-manuscript.pdf (1.69 Mo) Télécharger le fichier
Origine Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-03511749 , version 1 (06-01-2022)

Identifiants

Citer

Véronique Doquet, Alexandre Tanguy, Simon Hallais, Raphaël Guillemet, Julie Cholet, et al.. Mechanical behavior of surface-patterned and coated Si or Ge wafers for superhydrophobic and antireflective light transmitting windows. Journal of Materials Science, In press, ⟨10.1007/s10853-021-06794-1⟩. ⟨hal-03511749⟩
54 Consultations
78 Téléchargements

Altmetric

Partager

More