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Article Dans Une Revue Semiconductor Science and Technology Année : 2021

Correlative STEM-HAADF and STEM-EDX tomography for the 3D morphological and chemical analysis of semiconductor devices

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Matériaux
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hal-03483008 , version 1 (16-12-2021)

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Martin Jacob, Julien Sorel, Rafael Bortolin Pinhiero, Frederic Mazen, Adeline Grenier, et al.. Correlative STEM-HAADF and STEM-EDX tomography for the 3D morphological and chemical analysis of semiconductor devices. Semiconductor Science and Technology, 2021, 36, ⟨10.1088/1361-6641/abd925⟩. ⟨hal-03483008⟩
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