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Poster De Conférence Année : 2021

Design and construction of an ultra-high vacuum set up for the characterization of getter films deposited on wafers

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hal-03398752 , version 1 (23-10-2021)

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  • HAL Id : hal-03398752 , version 1

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Alain Bosseboeuf, C Bessouet, P Coste, F Parrain, A Poizat, et al.. Design and construction of an ultra-high vacuum set up for the characterization of getter films deposited on wafers. 16th European Vacuum Conference, Nov 2021, Marseille, France. ⟨hal-03398752⟩
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