Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-Based Visual Tracking
Résumé
This work deals with an automated micro-assembly of MEMS die holders using a 3D visual servoing approach. Visual positioning which was used is based on eye-to-hand tracking principle. The 3D poses of the MEMS are supplied in a real-time by a 3D (CAD) model-based tracking algorithm. Having executed the visual servoing the accuracy and repeatability of this method was examined. The micro-assembly process was performed and the accuracy calculated according to ISO 9283. The achieved accuracy was 0.345 μm and repeatability was 4.3 μm. The rotation accuracy was less than 0.13°.
Domaines
Automatique / Robotique
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