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Article Dans Une Revue Applied Mechanics and Materials Année : 2014

Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-Based Visual Tracking

Brahim Tamadazte
Ondřej Matúšek
  • Fonction : Auteur
Vlastimil Hotař
  • Fonction : Auteur
Guillaume Laurent
  • Fonction : Auteur
Cedric Clevy
  • Fonction : Auteur

Résumé

This work deals with an automated micro-assembly of MEMS die holders using a 3D visual servoing approach. Visual positioning which was used is based on eye-to-hand tracking principle. The 3D poses of the MEMS are supplied in a real-time by a 3D (CAD) model-based tracking algorithm. Having executed the visual servoing the accuracy and repeatability of this method was examined. The micro-assembly process was performed and the accuracy calculated according to ISO 9283. The achieved accuracy was 0.345 μm and repeatability was 4.3 μm. The rotation accuracy was less than 0.13°.
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Dates et versions

hal-03358350 , version 1 (07-07-2022)

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Brahim Tamadazte, Ondřej Matúšek, Vlastimil Hotař, Guillaume Laurent, Cedric Clevy. Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-Based Visual Tracking. Applied Mechanics and Materials, 2014, 613, pp.426-433. ⟨10.4028/www.scientific.net/AMM.613.426⟩. ⟨hal-03358350⟩

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