Microfabrication Developments for Future Instruments Using KID Detectors
Résumé
The NIKA2 instrument, operating at the IRAM 30-m telescope, demonstrates that the aluminum LEKID technology is a state-of-the-art solution for detectors dedicated to millimeter-wave astronomy. Following this path, several instrumental projects envisage today the use of LEKID technology. To cover the full 60–600 GHz band, relevant for CMB-oriented experiments, we are exploring new materials and solutions and we present our latest results. We present a new technology from NIKA2 developments to address the band 450–650 GHz. And we expose our first developments of the trilayer Al/Ti/Al technology following our work for low frequencies (60–80 GHz).