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Journal Articles Thin Solid Films Year : 2017

Controlling refractive index in AlN films by texture and crystallinity manipulation

Abstract

Highly textured polycrystalline aluminum nitride (c-AlN) thin films with hexagonal wurtzite structure have been prepared by direct current reactive magnetron sputtering (DC) of pure aluminum using different compositions of the gas phase and different substrate temperatures.
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Dates and versions

hal-03281702 , version 1 (08-07-2021)

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Alaa E Giba, Philippe Pigeat, Stéphanie Bruyère, Thomas Easwarakhanthan, Frank Mücklich, et al.. Controlling refractive index in AlN films by texture and crystallinity manipulation. Thin Solid Films, 2017, 636, pp.537-545. ⟨10.1016/j.tsf.2017.06.057⟩. ⟨hal-03281702⟩
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