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Article Dans Une Revue Plasma Sources Science and Technology Année : 2021

Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms

Dimitri Boivin
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Robert Hugon
Jamal Bougdira
Ludovic de Poucques

Résumé

We investigated the transport titanium ions produced in a reactive high-power impulse magnetron sputtering (HiPIMS) device used for TiN coating deposition. Time-resolved mass spectrometry measurements of ionized sputtered atoms correlated to time-resolved tuneable diode-laser induced fluorescence (TR-TDLIF) measurements of neutral sputtered atoms were used to understand transport features. Based on ion energy distributions of Ti + , we identified four populations of ions and explore their physical origins. The signals of all ion populations decrease strongly when only 1% N2 is added to the Ar/N2 gas mixture. Time resolved mass spectrometry confirms the result reported in previous work: the fast target poisoning when nitrogen is added in HiPIMS discharges. Based on the measured energy distribution functions of Ti ++ , N + , N2 + , and Ar + , we discuss the production of these ions in HiPIMS discharges. The temperature of thermalized sputtered neutral atoms determined by previous TR-TDLIF measurements evidences the physical origin of an ion population with energies lower than 4 eV. According to discharge pressure, cathode voltage, and ion type, we also discuss the physical origins of high-energy ions (>4 eV).
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Dates et versions

hal-03241455 , version 1 (28-05-2021)

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Abderzak El Farsy, Dimitri Boivin, Cédric Noel, Robert Hugon, Stephane Cuynet, et al.. Ionized particle transport in reactive HiPIMS discharge: correlation between the energy distribution functions of neutral and ionized atoms. Plasma Sources Science and Technology, In press, ⟨10.1088/1361-6595/ac02b4⟩. ⟨hal-03241455⟩
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