Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films - Archive ouverte HAL
Article Dans Une Revue IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control Année : 2021

Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films

Yang Yang
Sami Hage-Ali
Michel Hehn
Omar Elmazria

Résumé

Surface acoustic wave (SAW) sensors with ferromagnetic materials are used to measure magnetic fields or electric currents. The magnetic field sensitivities of SAW magnetic field sensors are essentially influenced by various factors. The sensing mechanism is complex due to the multiphysics coupling of the magnetic field, solid mechanics, and electric field. The magnetostriction effect, ΔE effect, and the third-order material constants are taken into consideration. The shape demagnetizing effect is reduced by increasing the lengthwidth ratio and length-height ratio of a ferromagnetic film on a SAW resonator. The model is verified by experiments and accurately predicts the magnetic field sensitivities of SAW resonant magnetic field sensors. The factors affecting the sensitivities are investigated from the perspective of the sensing mechanism. A grooved sensing surface structure is explored for an improved sensitivity. The results are beneficial to design reliable SAW magnetic field sensors with an enhanced sensitivity.
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Dates et versions

hal-03239335 , version 1 (27-05-2021)

Identifiants

Citer

Yang Yang, Harshad Mishra, Tao Han, Sami Hage-Ali, Michel Hehn, et al.. Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2021, ⟨10.1109/tuffc.2021.3069382⟩. ⟨hal-03239335⟩
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