Optimization, design and characterization of a piezoelectric micro-suspension for isolating sensitive electronic devices - Archive ouverte HAL
Communication Dans Un Congrès Année : 2012

Optimization, design and characterization of a piezoelectric micro-suspension for isolating sensitive electronic devices

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Optimization, design and characterization of a piezoelectric micro-suspension for isolating sensitive electronic devices
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hal-03223637 , version 1 (11-05-2021)

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  • HAL Id : hal-03223637 , version 1

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Manuel Collet, Thierry Verdot, P Muralt. Optimization, design and characterization of a piezoelectric micro-suspension for isolating sensitive electronic devices. Workshop Micro Control, May 2012, Besançon, France. ⟨hal-03223637⟩
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