Buckling and non-linear vibrations of a MEMS biosensor - Archive ouverte HAL
Communication Dans Un Congrès Année : 2008

Buckling and non-linear vibrations of a MEMS biosensor

Résumé

The large amplitude non-linear vibratory behavior of a stratified circular plate with a piezoelectric patch is addressed in this study. The goal is to build an efficient model of a resonating MEMS (Micro Electro Mechanical System) bio-sensor whose function is to detect in real-time the presence of a given molecule (the so called target molecule) in a liquid medium. This study introduces the plate equations of motion, that includes the effects thermal-like prestresses, the piezo-electric material, its stratified structure with two annular regions and the geometrical non-linearities stemming from large deflections. Their resolution by an expansion onto the eigenmodes of the unstressed system gives the first insights in the buckling phenomena and the nonlinear vibrations.
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Dates et versions

hal-03179355 , version 1 (29-07-2024)

Identifiants

  • HAL Id : hal-03179355 , version 1

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Olivier Thomas, Liviu Nicu, Cédric Ayela, Cyril Touzé. Buckling and non-linear vibrations of a MEMS biosensor. Sixth EUROMECH Nonlinear Dynamics Conference, ENOC 2008, Jun 2008, Saint Petersburg, Russia. ⟨hal-03179355⟩
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