28 nm UTBB FD-SOI technology for Silicon-based quantum dots and Cryo-CMOS electronics - Archive ouverte HAL
Communication Dans Un Congrès Année : 2019

28 nm UTBB FD-SOI technology for Silicon-based quantum dots and Cryo-CMOS electronics

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hal-03178723 , version 1 (24-03-2021)

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  • HAL Id : hal-03178723 , version 1

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I. Kriekouki, Sophie Rochette, Claude Rohrbacher, J. Camirand Lemyre, Michel Pioro-Ladriere, et al.. 28 nm UTBB FD-SOI technology for Silicon-based quantum dots and Cryo-CMOS electronics. Silicon Quantum Electronics Workshop (SiQEW 2019), Oct 2019, San Sabastian, Spain. ⟨hal-03178723⟩
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