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Article Dans Une Revue Intermetallics Année : 2013

Growth of magnesium silicide thin films on Si(100), Si(111) and SOI substrates during rapid thermal processing

Iu. Kogut
  • Fonction : Auteur
M.-C. Record

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Chimie

Dates et versions

hal-03110880 , version 1 (14-01-2021)

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Citer

Iu. Kogut, M.-C. Record. Growth of magnesium silicide thin films on Si(100), Si(111) and SOI substrates during rapid thermal processing. Intermetallics, 2013, 32, pp.184-193. ⟨10.1016/j.intermet.2012.08.029⟩. ⟨hal-03110880⟩

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UNIV-AMU
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