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Article Dans Une Revue ACS Applied Materials & Interfaces Année : 2020

Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon

Résumé

The monolithic integration of sub-micron quartz structures on silicon substrates is a key issue for the future development of piezoelectric devices as prospective sensors with applications based on the operation in the high-frequency range. However, to date, it has not been possible to make existing quartz manufacturing methods compatible with integration on silicon and structuration by top-down lithographic techniques. Here, we report an unprecedented large-scale fabrication of ordered arrays of piezoelectric epitaxial quartz nanostructures on silicon substrates by the combination of soft-chemistry and three lithographic techniques: (i) laser interference lithography, (ii) soft nanoimprint lithography on Sr-doped SiO2 sol–gel thin films, and (iii) self-assembled SrCO3 nanoparticle reactive nanomasks. Epitaxial α-quartz nanopillars with different diameters (from 1 μm down to 50 nm) and heights (up to 2 μm) were obtained. This work demonstrates the complementarity of soft-chemistry and top-down lithographic techniques for the patterning of epitaxial quartz thin films on silicon while preserving its epitaxial crystallinity and piezoelectric properties. These results open up the opportunity to develop a cost-effective on-chip integration of nanostructured piezoelectric α-quartz MEMS with enhanced sensing properties of relevance in different fields of application.

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Qianzhe Zhang, David Sánchez-Fuentes, Rudy Desgarceaux, Pau Escofet-Majoral, Judith Oró-Soler, et al.. Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon. ACS Applied Materials & Interfaces, 2020, 12 (4), pp.4732-4740. ⟨10.1021/acsami.9b18555⟩. ⟨hal-03093824⟩
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