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Communication Dans Un Congrès Année : 2016

Dynamic identification of perforated MEMS devices by the continuous wavelet transform

Résumé

Micro electro mechanical systems (MEMS) are built using integrated circuits and include movable parts, such as perforated microplates, wich can oscillate. To control such oscillations it is necessary to know the modal parameters: eigenfrequencies, damping ratios and stiffness of the perforated microplates. The purpose of this communication is to identify the modal parameters of a perforated microplate using only the time data obtained from the displacement of the microplate. Dynamic measurements of a perforated microplate are conducted in time domain and we use the continuous wavelet transform of such measurements to identify the modal parameters of the vibrating perforated microplate. Experimental results are presented showing the effectiveness of the procedure in modal parameter identification.
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Dates et versions

hal-03053056 , version 1 (10-12-2020)

Identifiants

  • HAL Id : hal-03053056 , version 1

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Joseph Lardies, Thien Phu Le. Dynamic identification of perforated MEMS devices by the continuous wavelet transform. International Conference on Nanotechnology and Nanomaterials in Energy, Jun 2016, Paris, France. ⟨hal-03053056⟩
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