Inverse modelling for 3D Nano-localization of charges in thin dielectric
Résumé
Recent experimental studies demonstrated that Electrostatic Force Distance Curve (EFDC) can be used for space charge probing in thin dielectric layers. The main advantage of this method is its high sensitivity to charge localization. In this paper, we developed an inverse method to recover the space charge using only the EFDC.
Domaines
Sciences de l'ingénieur [physics]Origine | Fichiers produits par l'(les) auteur(s) |
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