Communication Dans Un Congrès Année : 2005

High performing 8 /spl Orang/ EOT HfO/sub 2/ / tan low thermal-budget n-channel FETs with solid-phase epitaxially regrown (SPER) junctions

Fichier non déposé

Dates et versions

hal-02952626 , version 1 (29-09-2020)

Identifiants

Citer

Lionel Trojman, Lars-Åke Ragnarsson, Simone Severi, K.D. Johnson, David Brunco, et al.. High performing 8 /spl Orang/ EOT HfO/sub 2/ / tan low thermal-budget n-channel FETs with solid-phase epitaxially regrown (SPER) junctions. Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005., 2005, Kyoto, Japan. pp.234-235, ⟨10.1109/.2005.1469281⟩. ⟨hal-02952626⟩

Collections

76 Consultations
0 Téléchargements

Altmetric

Partager

  • More