‘Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering’

M.T. Ta; D. Briand; Y. Guhel; J. Bernard; J.C. Pesant; B. Boudart

Journal Articles Thin Solid Films Year : 2008

‘Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering’

, , (1) , , ,

1

M.T. Ta

Function : Author

D. Briand

Function : Author

Y. Guhel

Function : Author

Laboratoire Universitaire des Sciences Appliquées de Cherbourg

J. Bernard

Function : Author

J.C. Pesant

Function : Author

B. Boudart

Function : Author

Domains

Engineering Sciences [physics]

Yannick Guhel : Connect in order to contact the contributor

https://hal.science/hal-02936063

Submitted on : Friday, September 11, 2020-12:11:08 AM

Last modification on : Wednesday, March 9, 2022-2:14:03 PM

Dates and versions

hal-02936063 , version 1 (11-09-2020)

Identifiers

HAL Id : hal-02936063 , version 1

Cite

M.T. Ta, D. Briand, Y. Guhel, J. Bernard, J.C. Pesant, et al.. ‘Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering’. Thin Solid Films, 2008. ⟨hal-02936063⟩

‘Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering’

Domains

Dates and versions

Identifiers

Cite

Export

Collections

Share