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Article Dans Une Revue Scientific Reports Année : 2020

Controlling the flux of reactive species: a case study on thin film deposition in an aniline/argon plasma

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hal-02877171 , version 1 (22-06-2020)

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Dario Sciacqua, Cédric Pattyn, Andrea Jagodar, Erik von Wahl, Thomas Lecas, et al.. Controlling the flux of reactive species: a case study on thin film deposition in an aniline/argon plasma. Scientific Reports, 2020, 10, pp.15913. ⟨10.1038/s41598-020-72634-y⟩. ⟨hal-02877171⟩
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