Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms
Résumé
We report experimental and particle-based kinetic simulation studies of low-pressure capacitively coupled oxygen plasmas driven by tailored voltage waveforms. Experimental results on the dc self-bias voltage, the electrical power deposition, the flux density and flux-energy distribution of positive ions, as well as spatiotemporal distribution of the plasma emission are compared with simulation data for a wide range of operating conditions. A good agreement between simulation and experiment is found, which shows that the collision-reaction model underlying the simulations describes reasonably the complicated chemistry of oxygen plasmas.