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Poster De Conférence Année : 2016

Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms

A. Derzsi
  • Fonction : Auteur
Bastien Bruneau
  • Fonction : Auteur
Trevor Lafleur
Jean-Paul Booth
Ihor Korolov
  • Fonction : Auteur
T. Gans
  • Fonction : Auteur
Z. Donko
  • Fonction : Auteur

Résumé

We report experimental and particle-based kinetic simulation studies of low-pressure capacitively coupled oxygen plasmas driven by tailored voltage waveforms. Experimental results on the dc self-bias voltage, the electrical power deposition, the flux density and flux-energy distribution of positive ions, as well as spatiotemporal distribution of the plasma emission are compared with simulation data for a wide range of operating conditions. A good agreement between simulation and experiment is found, which shows that the collision-reaction model underlying the simulations describes reasonably the complicated chemistry of oxygen plasmas.
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Dates et versions

hal-02611337 , version 1 (18-05-2020)

Identifiants

  • HAL Id : hal-02611337 , version 1

Citer

A. Derzsi, Bastien Bruneau, Trevor Lafleur, Jean-Paul Booth, Ihor Korolov, et al.. Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms. ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016. ⟨hal-02611337⟩
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