Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures - Archive ouverte HAL
Communication Dans Un Congrès Année : 2015

Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl2/O2 mixtures

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hal-02593663 , version 1 (15-05-2020)

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  • HAL Id : hal-02593663 , version 1

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Jean-Paul Booth, Mickaël Foucher, Daniil Marinov, Pascal Chabert. Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl2/O2 mixtures. Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France. ⟨hal-02593663⟩
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