A long-range plasmonic optical waveguide corner mirror chip - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Micro and Nano Engineering Année : 2020

A long-range plasmonic optical waveguide corner mirror chip

Résumé

We provide the experimental proof of concept of on-chip 90° corner waveguide arrays based on ultra-long-range surface plasmon polariton waveguides working in TM-polarization at 1.55 μm. The single-mode waveguides comprise a thin gold-photoresist core embedded into SU-8 claddings and show typical propagation loss of ~1 dB/mm. A prismatic cavity integrated into the cladding layers and aligned with the waveguide's corner assures the total internal reflection. We present a fabrication method to integrate the waveguide corner mirror based on self-alignment of multiple lithography steps. This chip has potential as low-loss perpendicular interface for single-mode high speed communication interconnects.

Dates et versions

hal-02508816 , version 1 (16-03-2020)

Identifiants

Citer

Laurent Markey, Christian Vernoux, Kamal Hammani, Juan Arocas, Jean-Claude Weeber, et al.. A long-range plasmonic optical waveguide corner mirror chip. Micro and Nano Engineering, 2020, 7, pp.100049. ⟨10.1016/j.mne.2020.100049⟩. ⟨hal-02508816⟩
52 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More