Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition - Archive ouverte HAL
Article Dans Une Revue European Physical Journal: Applied Physics Année : 2018

Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition

Dates et versions

hal-02492690 , version 1 (27-02-2020)

Identifiants

Citer

Fabien Benedic, Benoit Baudrillart, Jocelyn Achard. Modelling of low-temperature/large-area distributed antenna array microwave-plasma reactor used for nanocrystalline diamond deposition. European Physical Journal: Applied Physics, 2018, 81 (1), pp.10804. ⟨10.1051/epjap/2017170238⟩. ⟨hal-02492690⟩
50 Consultations
0 Téléchargements

Altmetric

Partager

More