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Poster De Conférence Année : 2019

MEMS based nanofluidics device for the study of the nonlinear dynamics associate with the geochemical processes

Résumé

To understand the evolution of man-impacted hydrosystems with the Earth Sciences, MEMS based nanofluidics devices were prepared. This paper presents the detailed different fabrication steps used for the preparation of successful nanofluidics devices.
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Dates et versions

hal-02479390 , version 1 (14-02-2020)

Identifiants

  • HAL Id : hal-02479390 , version 1

Citer

Mukesh Kulsreshath, Arnaud Stolz, Philippe Lefaucheux, Lionel Mercury, Remi Dussart. MEMS based nanofluidics device for the study of the nonlinear dynamics associate with the geochemical processes. French symposium on Emerging Technologies for Micronanofabrication, Nov 2019, Grenoble, France. ⟨hal-02479390⟩
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