A versatile and compact high-intensity electron beam for multi-kGy irradiation in nano- or micro-electronic devices - Archive ouverte HAL
Article Dans Une Revue Applied Physics Letters Année : 2020

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hal-02457213 , version 1 (27-01-2020)

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F. Gobet, J. Gardelle, M. Versteegen, L. Courtois, S. Leblanc, et al.. A versatile and compact high-intensity electron beam for multi-kGy irradiation in nano- or micro-electronic devices. Applied Physics Letters, 2020, 116 (4), pp.044102. ⟨10.1063/1.5141476⟩. ⟨hal-02457213⟩
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