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Article Dans Une Revue Materials Science and Engineering: B Année : 2000

The influence of preparation conditions on the electrical and optical properties of oxidized indium thin films

Mihaela Girtan
G.I. Rusu
  • Fonction : Auteur
G.G. Rusu
  • Fonction : Auteur

Résumé

Highly conductive indium oxide thin films (ρ = 5 × 10-3 Ω cm) have been prepared by thermal oxidation in an open atmosphere of indium films deposited in vacuum by evaporation. The rate of indium film deposition was high (5 Å s-1), and the oxidation has been carried out by exposing the samples to the atmosphere directly at high temperature (500°C) for different times. Structural, optical and electrical properties of these samples were investigated. Films exhibit a (111) preferred orientation, The value of the transmittance coefficient in the visible region of the spectrum was low (50%) but, concerning the electrical properties, an interesting behaviour was observed: at temperatures above room temperature the electrical resistance depends on the sense of the electrical current flow. © 2000 Elsevier Science S.A. All rights reserved.

Dates et versions

hal-02443204 , version 1 (17-01-2020)

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Citer

Mihaela Girtan, G.I. Rusu, G.G. Rusu. The influence of preparation conditions on the electrical and optical properties of oxidized indium thin films. Materials Science and Engineering: B, 2000, 76 (2), pp.156-160. ⟨10.1016/S0921-5107(00)00439-6⟩. ⟨hal-02443204⟩

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